15.1 薄膜基础性能检测设备Basic Performance Testing Equipment for Thin Films
厚度与均匀性检测Thickness and Uniformity Testing
椭圆偏振仪 Ellipsometer | 台阶仪 Profilometer | 白光干涉仪 White Light Interferometer |
X射线荧光测厚仪（XRF） X-ray Fluorescence Thickness Gauge (XRF) |
表面形貌与粗糙度分析Surface Topography and Roughness Analysis
扫描电子显微镜（SEM） Scanning Electron Microscope (SEM) | 原子力显微镜（AFM） Atomic Force Microscope (AFM) | 激光共聚焦显微镜 Laser Confocal Microscope |
硬度与耐磨性测试Hardness and Wear Resistance Testing
纳米压痕仪 Nanoindentation Tester | 显微硬度计 Microhardness Tester | 摩擦磨损试验机（球盘/销盘式） Friction and Wear Tester (Ball-on-Disk / Pin-on-Disk Type) |
15.2 成分与结构分析设备Component and Structure Analysis Equipment
元素组成与纯度检测Element Composition and Purity Testing
能量色散X射线光谱仪（EDS） Energy Dispersive X-ray Spectrometer (EDS) | X射线光电子能谱仪（XPS） X-ray Photoelectron Spectrometer (XPS) | 电感耦合等离子体质谱仪(ICP-MS) Inductively Coupled Plasma Mass Spectrometer (ICP-MS) |
晶体结构与相组成分析Analysis of Crystal Structure and Phase Composition
X射线衍射仪（XRD） X-ray Diffractometer (XRD) | 透射电子显微镜（TEM） Transmission Electron Microscope (TEM) | 选区电子衍射（SAED） Selected Area Electron Diffraction (SAED) |
界面成分分布分析Analysis of Interface Composition Distribution
俄歇电子能谱仪（AES） Auger Electron Spectrometer (AES) | 二次离子质谱仪（SIMS） Secondary Ion Mass Spectrometer (SIMS) | 高角环形暗场扫描透射电子显微镜 （HAADF-STEM） High-Angle Annular Dark-Field Scanning Transmission Electron Microscope (HAADF-STEM) |
15.3 功能性能评估设备Function and Performance Evaluation Equipment
附着力检测 Adhesion Test
划格仪 Cross-Cut Adhesion Tester | 划圈法附着力测试仪 Circular Scratch Adhesion Tester | 拉伸法附着力试验机 Tensile Adhesion Testing Machine |
耐腐蚀性测试Corrosion Resistance Test
盐雾试验箱 Salt Spray Test Chamber | 电化学工作站（极化曲线/阻抗谱测试） Electrochemical Workstation (for Polarization Curve / Impedance Spectroscopy Testing) | 湿热试验箱 Damp Heat Test Chamber |
电学性能检测Electrical Performance Testing
四探针电阻测试仪 Four-Point Probe Resistance Tester | 霍尔效应测试仪 Hall Effect Tester | 介电常数测试仪 Dielectric Constant Tester |
光学性能检测Optical Performance Testing
紫外-可见-近红外分光光度计 UV-Visible-Near Infrared (UV-Vis-NIR) Spectrophotometer | 椭偏仪（光学常数计算）、光泽度仪 Ellipsometer (for optical constant calculation), Gloss Meter |
15.4 薄膜结构与形貌分析专用设备Specialized Equipment for Thin Film Structure and Morphology Analysis
外延层质量检测Epitaxial Layer Quality Inspection 或 Epitaxial Layer Quality Testing
高分辨率X射线衍射仪（HRXRD） High-Resolution X-Ray Diffractometer (HRXRD) | 反射式高能电子衍射仪（RHEED） Reflection High-Energy Electron Diffractometer (RHEED) |
多孔与涂层结构表征Characterization of Porous and Coating Structures
聚焦离子束扫描电子显微镜（FIB-SEM） Focused Ion Beam Scanning Electron Microscope (FIB-SEM) | 孔隙率分析仪（压汞法/气体吸附法） Porosity Analyzer (Mercury Intrusion Porosimetry / Gas Adsorption Method) |
15.5 高温与力学性能评估设备High-Temperature and Mechanical Property Evaluation Equipment
高温稳定性测试High-temperature stability test
热重分析仪（TGA） Thermogravimetric Analyzer (TGA) | 差示扫描量热仪（DSC） Differential Scanning Calorimeter (DSC) | 高温热老化试验箱 High-Temperature Thermal Aging Test Chamber |
热导率与热膨胀系数检测Detection of Thermal Conductivity and Thermal Expansion Coefficient
激光导热仪 Laser Flash Apparatus | 热膨胀仪 Thermal Dilatometer |
高温力学性能测试High-temperature mechanical property testing
高温拉伸试验机 High-Temperature Tensile Testing Machine | 高温蠕变试验机 High-Temperature Creep Testing Machine |
15.6 功能与可靠性验证设备Function and Reliability Verification Equipment
介电性能测试Dielectric Property Testing
宽频介电阻抗谱仪 Broadband Dielectric Impedance Spectrometer | 高温介电温谱仪 High-Temperature Dielectric Temperature Spectrometer |
催化活性评估Catalytic Activity Evaluation
原位漫反射红外光谱仪（DRIFTS） In-situ Diffuse Reflectance Infrared Fourier Transform Spectroscopy (DRIFTS) | 催化反应评价装置 Catalytic Reaction Evaluation Device |
长期可靠性测试Long-Term Reliability Test
加速寿命试验箱（温度循环/振动复合测试 Accelerated Life Test Chamber (Temperature Cycling / Vibration Combined Test) |
15.7 原子级薄膜性能检测设备Atomic-level thin film performance testing equipment
超薄厚度与均匀性分析Analysis of Ultra-Thin Thickness and Uniformity
X射线反射仪（XRR） X-ray Reflectometer (XRR) | 高分辨率椭圆偏振仪（光谱范围扩展至深紫外） High-Resolution Ellipsometer (with the spectral range extended to deep ultraviolet) |
表面平整度与缺陷检测Surface Flatness and Defect Detection
非接触式光学轮廓仪（纳米级分辨率） Non-contact Optical Profiler (Nano-scale Resolution) | 原子力显微镜（AFM，大范围扫描模式） Atomic Force Microscope (AFM, Large-range Scanning Mode) |
密度与致密度评估Evaluation of Density and Compactness
X射线荧光密度计 X-ray Fluorescence Densitometer | 小角X射线散射仪（SAXS） Small-Angle X-ray Scattering Instrument (SAXS) |
15.8 化学与界面分析专用设备Specialized Equipment for Chemical and Interface Analysis
原子配位环境分析Analysis of Atomic Coordination Environment
X射线吸收精细结构谱仪（XAFS） X-ray Absorption Fine Structure Spectrometer (XAFS) | 拉曼光谱仪（高分辨率） Raman Spectrometer (High Resolution) |
前驱体残留检测Precursor Residue Detection
气相色谱-质谱联用仪（GC-MS） Gas Chromatography-Mass Spectrometry (GC-MS) | 二次离子质谱仪（SIMS，高灵敏度模式） Secondary Ion Mass Spectrometry (SIMS, High Sensitivity Mode) | 纳米级功能性能测试设备 Nanoscale Functional Performance Testing Equipment |
纳米力学性能评估Evaluation of Nanomechanical Properties
原位纳米压痕仪（结合SEM/TEM观察） In-situ Nanoindentation Tester (combined with SEM/TEM observation) | 纳米划痕仪 Nano-scratch Tester |
阻隔性能测试Barrier Property Testing
水蒸气透过率测试仪 Water Vapor Transmission Rate Tester | 氧气透过率测试仪（膜片/器件级） Oxygen Transmission Rate Tester (Diaphragm/Device Level) |
电学均匀性检测Electrical Uniformity Testing
扫描开尔文探针显微镜（SKPM） Scanning Kelvin Probe Microscopy (SKPM) | 导电原子力显微镜（C-AFM） Conductive Atomic Force Microscopy (C-AFM) |
15.9 先进器件与可靠性设备Advanced Devices and Reliability Equipment
量子效率与光电性能测试Quantum Efficiency and Photoelectric Performance Testing
量子效率测试仪 Quantum Efficiency Tester | 时间分辨荧光光谱仪 Time-Resolved Fluorescence Spectrometer |
电化学性能评估Electrochemical Performance Evaluation
原位电化学原子力显微镜（EC-AFM） In-situ Electrochemical Atomic Force Microscopy (EC-AFM) | 电池循环性能测试系统 Battery Cycle Performance Testing System |
极端环境可靠性验证Extreme Environment Reliability Verification
高低温冲击试验箱 High and Low Temperature Shock Test Chamber | 辐射老化试验装置（γ/X射线） Radiation Aging Test Facility (γ/X-ray)Radiation Aging Test Facility (γ/X-ray) |
15.10 失效分析专用设备（跨技术通用）Specialized Equipment for Failure Analysis (Cross-Technology Universal)
镀层剥落原因诊断Diagnosis of Coating Peeling Causes
扫描电子显微镜（断面分析） Scanning Electron Microscope (Cross-Section Analysis) | X射线光电子能谱仪（界面污染分析） X-ray Photoelectron Spectrometer (Interface Contamination Analysis) |
磨损失效分析Wear Failure Analysis
三维表面轮廓仪（磨损体积计算） Three-Dimensional Surface Profiler (Wear Volume Calculation) | 能谱仪（磨屑成分分析） Energy Dispersive Spectrometer (Wear Debris Composition Analysis) |
色差与外观缺陷分析Analysis of Color Difference and Appearance Defects
分光测色仪 Spectrophotometer | 缺陷检测仪（光学/电子显微镜联用） Defect Detector (with Optical/Electron Microscope Combination) |
