真空科技与应用展览分类
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1. 物料传输机构Material Transfer Mechanism 2. 真空隔离装置Vacuum Isolation Device 3. 镀膜后产品传输机构Coated Product Transfer Mechanism 4. 真空恢复与产品取出装置Vacuum Recovery and Product Extraction Device 5. 自动化识别装置Automatic Identification Device
6. 缓存与暂存机构Cache and Staging Mechanism 7. 自动上下料机器人Automatic Loading and Unloading Robot 8. 磁悬浮传输系统Magnetic Levitation Conveyance System 9. 基片厚度检测装置Substrate Thickness Detection Device |