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【 核心定义 | Core Definition 】真空技术在显示与光电器件领域是指在真空环境下，通过物理或化学方法在基板表面沉积功能性薄膜，赋予器件光学、电学、防护等特定性能的技术体系。当前，几乎所有平板显示屏、AR/VR光学元件、光电传感器的核心功能层均依赖真空镀膜工艺实现。
Vacuum technology in the field of displays and optoelectronic devices refers to a technical system that deposits functional thin films on substrate surfaces via physical or chemical methods in a vacuum environment, endowing devices with specific properties such as optical, electrical, and protective performance. At present, the core functional layers of almost all flat panel displays, AR/VR optical components, and optoelectronic sensors rely on vacuum coating processes. 光学性能精准调控：真空镀膜可在纳米尺度上精确控制膜层厚度与折射率，实现增透、反射、滤光、分光等复杂光学功能。 低温工艺适配柔性显示：等离子体增强沉积技术可在低温下成膜，适配有机发光材料和柔性基板的热敏感特性。 大面积均匀成膜：针对从第1代到第11代的大尺寸玻璃基板，膜厚偏差可控制在±2%以内。 多层膜系集成能力：可在同一工艺平台上完成数十层甚至上百层薄膜的堆叠制备。
Precise control of optical properties: Vacuum coating enables accurate control of film thickness and refractive index at the nanometer scale, achieving complex optical functions such as anti-reflection, reflection, light filtering, and light splitting. Low-temperature process for flexible displays: Plasma-enhanced deposition allows film formation at low temperatures, matching the thermal sensitivity of organic light-emitting materials and flexible substrates. Large-area uniform film deposition: For large-size glass substrates from Generation 1 to Generation 11, film thickness variation can be controlled within ±2%. Multi-layer coating integration capability: Dozens or even hundreds of thin films can be stacked and fabricated on the same process platform.
【 按真空度等级划分 | Classified by Vacuum Degree Levels 】低真空（10⁵～10⁻¹ Pa）：基板传输、腔室粗抽。 高真空（10⁻¹～10⁻⁵ Pa）：磁控溅射、电子束蒸发等主流光学镀膜。 超高真空（10⁻⁵～10⁻⁸ Pa）：有机半导体蒸镀、分子束外延。 Low Vacuum (10⁵ ~ 10⁻¹ Pa): Substrate transfer and rough pumping of chambers. High Vacuum (10⁻¹ ~ 10⁻⁵ Pa): Mainstream optical coating processes such as magnetron sputtering and electron beam evaporation. Ultra-High Vacuum (10⁻⁵ ~ 10⁻⁸ Pa): Organic semiconductor evaporation and molecular beam epitaxy.
【 按材料类型划分 | Classified by Material Type 】透明导电薄膜：ITO、IZO等，用于触控电极和显示像素电极。 光学功能薄膜：增透膜（AR）、反射膜、滤光膜、防眩膜（AG）、防指纹膜（AF）。 封装阻隔薄膜：Al₂O₃、SiNₓ等，用于OLED薄膜封装（WVTR <10⁻⁶ g/m²/day）。 有机半导体薄膜：OLED发光层、电子/空穴传输层，通过真空热蒸镀实现。 Transparent conductive thin films: ITO, IZO, etc., used for touch electrodes and display pixel electrodes. Optical functional thin films: Anti-reflection (AR) coatings, reflective films, optical filters, anti-glare (AG) films, and anti-fingerprint (AF) films. Encapsulation barrier thin films: Al₂O₃, SiNₓ, etc., used for thin-film encapsulation of OLEDs (WVTR < 10⁻⁶ g/m²/day). Organic semiconductor thin films: OLED light-emitting layers, electron/hole transport layers, deposited by vacuum thermal evaporation.
【 按沉积工艺划分 | Classified by Deposition Process 】物理气相沉积（PVD）：真空蒸发镀（OLED有机材料）、磁控溅射镀（ITO、金属电极）、离子辅助沉积（提升致密度）。 化学气相沉积（CVD）/原子层沉积（ALD）：高精度封装阻隔层。 Physical Vapor Deposition (PVD): Vacuum evaporation coating (for OLED organic materials), magnetron sputtering coating (for ITO and metal electrodes), ion-assisted deposition (to improve film density). Chemical Vapor Deposition (CVD) / Atomic Layer Deposition (ALD): High-precision encapsulation barrier layers.
【 核心制备工艺 | Core Preparation Processes 】磁控溅射技术：大面积透明导电膜、金属电极规模化生产。 真空蒸镀技术：OLED有机发光层和金属阴极沉积，配合掩模板图形化。 等离子体增强技术：离子辅助沉积提升膜层致密度和附着力。 光学监控与终点检测：原位监测膜厚和折射率，保障多层膜系光学性能。 Magnetron Sputtering Technology: Large-scale production of large-area transparent conductive films and metal electrodes. Vacuum Evaporation Technology: Deposition of OLED organic light-emitting layers and metal cathodes, with patterning using shadow masks. Plasma Enhanced Technology: Ion-assisted deposition improves film density and adhesion. Optical Monitoring and Endpoint Detection: In-situ monitoring of film thickness and refractive index to ensure the optical performance of multi-layer coating systems.
【 核心性能 | Core Performance 】透光率：增透膜可将玻璃透光率从92%提升至99%以上。 反射率：高反射膜可达99%以上（用于OLED微腔、HUD）。 膜层均匀性：纳米级膜厚均匀性保障显示亮度和色度一致性。 界面陡峭性：影响器件光电性能，需严格控制沉积参数。 水氧阻隔性：OLED封装需WVTR <10⁻⁶ g/m²/day。 Light Transmittance: Anti-reflection coatings can increase glass light transmittance from 92% to over 99%. Reflectivity: High-reflection coatings can achieve reflectivity above 99% (used in OLED microcavities and HUDs). Film Uniformity: Nanometer-scale film thickness uniformity ensures consistent display brightness and chromaticity. Interface Abruptness: Affects the optoelectronic performance of devices and requires strict control of deposition parameters. Water and Oxygen Barrier Performance: OLED encapsulation requires WVTR < 10⁻⁶ g/m²/day.
【 主要应用领域 | Main Application Areas 】平板显示：LCD的ITO电极、TFT金属层；OLED的有机蒸镀与薄膜封装。 AR/VR/MR近眼显示：光波导纳米光栅镀膜、凸面镜片增透与硬质保护膜。 精密光学镀膜：红外截止滤光片、窄带滤光片、HUD抬头显示反射镜。 光电传感器：真空光电管（航空航天、医疗成像）、有机光电二极管（OPD）。 触控与传感：一体化触摸显示装置的透明导电层与金属强化层。 Flat Panel Displays: ITO electrodes and TFT metal layers for LCDs; organic evaporation and thin-film encapsulation for OLEDs. AR/VR/MR Near-Eye Displays: Optical waveguide nano-grating coatings, anti-reflection and hard protective films for convex lenses. Precision Optical Coatings: IR-cut filters, narrowband filters, and HUD reflective mirrors. Optoelectronic Sensors: Vacuum phototubes (aerospace, medical imaging), organic photodiodes (OPD). Touch and Sensing: Transparent conductive layers and metal reinforcement layers for integrated touch display devices.
中国电子真空器件行业市场规模从2019年的437.45亿元增长至2023年的528.62亿元。显示与光电器件领域的真空镀膜设备和工艺服务占据重要份额。2025年AR眼镜被视为“元年”，光波导真空镀膜需求快速增长。
The market size of China's electronic vacuum device industry increased from 43.745 billion yuan in 2019 to 52.862 billion yuan in 2023. Vacuum coating equipment and process services in the display and optoelectronic device sectors account for an important share. 2025 is regarded as the "first year" of AR glasses, and the demand for optical waveguide vacuum coating is growing rapidly. 显示产业核心支撑：真空镀膜在面板产线投资中占比约15%—20%。 终端应用倍增效应：撬动万亿级消费电子市场，如AR眼镜上游镀膜需求激增。 国产替代战略高地：高端光学镀膜设备国产化率不足30%，是“卡脖子”突破关键。 应用结构多元化：下游涵盖新能源汽车、航天军工、半导体设备等。
【 发展现状 | Development Status 】LCD技术高度成熟，OLED量产爬坡，AR/VR光学元件处于技术突破前夜。玻璃基板尺寸已至第11(2.34m×3.37m），对真空设备均匀性和产能要求极高。国内已有超600家真空设备企业，年销售额约160亿元，但高端领域仍有差距。 LCD technology is highly mature, OLED mass production is ramping up, and AR/VR optical components are on the eve of technological breakthroughs. Glass substrate sizes have reached Generation 11 (2.34m × 3.37m), imposing extremely high requirements on the uniformity and productivity of vacuum equipment. There are already more than 600 vacuum equipment enterprises in China with annual sales of approximately 16 billion yuan, yet gaps still exist in the high-end sector. 【 当前挑战 | Current Challenges 】高端镀膜设备依赖进口（如AR光波导镀膜设备）。 大面积均匀性控制难度大。 有机材料蒸镀效率瓶颈（利用率<30%）。 高端真空泵、阀门、光学监控系统等核心部件国产化不足。 Dependence on imported high-end coating equipment (such as AR optical waveguide coating equipment). High difficulty in controlling large-area uniformity. Bottleneck in organic material evaporation efficiency (utilization rate < 30%). Insufficient localization of core components including high-end vacuum pumps, valves, and optical monitoring systems.
【 发展趋势 | Development Trends 】 为促进真空技术领域的学术交流与产业合作，展示最新研究成果与技术突破，2026第八届真空科技交流会议暨展览会（IVTCE 2026）将于2026年10月14日至16日在中国深圳维纳斯皇家酒店（深圳国际会展中心店）隆重举行。 To promote academic exchange and industrial cooperation in the field of vacuum technology, and to showcase the latest research achievements and technological breakthroughs, the 8th International Vacuum Technology Conference & Exhibition (IVTCE 2026) will be grandly held at Venus Royal Hotel (Shenzhen International Convention and Exhibition Center Branch), Shenzhen, China, from October 14 to 16, 2026. 
【 会议基本信息 | Basic Conference Information 】
【 组织架构 | Organizational Structure 】
深圳市真空技术行业协会（SAVTI）Shenzhen Association of Vacuum Technology Industry (SAVTI) 深圳市宝安区真空产业技术创新联盟Bao’an District Vacuum Industry Technology Innovation Alliance, Shenzhen 深圳真空技术专家委员会Shenzhen Vacuum Technology Expert Committee
联合主办（排名不分先后）Co-Organized by (Ranked in no particular order)深圳市腐蚀与防护学会Shenzhen Society for Corrosion and Protection 哈尔滨工业大学（深圳）特殊环境物质科学研究院Institute of Materials Science for Extreme Environments, Harbin Institute of Technology (Shenzhen) 台州学院Taizhou University 厦门理工学院Xiamen University of Technology 深圳市真空学会Shenzhen Vacuum Society 四川大学电子信息学院College of Electronic and Information Engineering, Sichuan University 合肥工业大学机械工程学院School of Mechanical Engineering, Hefei University of Technology 江苏集萃表面工程技术研究所有限公司Jiangsu JITRI Surface Engineering Technology Research Institute Co., Ltd. 亚太真空技术与设备协会Asia-Pacific Vacuum Technology and Equipment Association 中南大学粉末冶金全国重点实验室State Key Laboratory of Powder Metallurgy, Central South University
【 会议核心亮点（九大板块）| Conference Highlights (9 Major Sections) 】
本届大会围绕真空技术赋能泛半导体与光电器件产业，精心设置九大专题板块，汇聚全球顶尖学者与企业技术专家：
Centering on how vacuum technology empowers the pan-semiconductor and optoelectronic device industries, the conference has carefully designed nine thematic sessions, bringing together top global scholars and enterprise technical experts.
| 板块 | 专题名称 | 核心聚焦 |
|---|
| 1 | 真空技术赋能半导体与集成电路创新 Vacuum Technology Empowers Innovation in Semiconductors and Integrated Circuits | 刻蚀、薄膜沉积、离子注入中的真空应用及先进制程挑战 Vacuum Applications in Etching, Thin Film Deposition, Ion Implantation and Challenges in Advanced Processes | | 2 | 等离子体科学与技术创新 Plasma Science and Technological Innovation | 等离子体源设计、诊断技术、在材料处理中的新机理 Plasma source design, diagnostic techniques, and novel mechanisms in material processing | | 3 | 涂层与薄膜材料的表征技术及性能分析 Characterization Technologies and Performance Analysis of Coatings and Thin Film Materials | SEM/TEM/XPS等先进表征手段、力学/光学/电学性能评价 Advanced characterization methods such as SEM/TEM/XPS, as well as mechanical, optical and electrical property evaluation. | | 4 | 真空技术赋能显示与光电器件创新 Vacuum Technology Empowers Innovation in Displays and Optoelectronic Devices | OLED蒸镀、AR光波导镀膜、柔性显示封装、光学滤光片 OLED evaporation, AR waveguide coating, flexible display packaging, optical filters | | 5 | 真空技术赋能新能源与能源存储创新 Vacuum Technology Empowers Innovation in New Energy and Energy Storage | 锂电/固态电池电极镀膜、太阳能电池透明导电膜、氢能组件 Electrode coating for lithium-ion/solid-state batteries, transparent conductive films for solar cells, hydrogen energy components | | 6 | 高端真空装备制造技术前沿应用 Cutting-edge Applications of High-end Vacuum Equipment Manufacturing Technology | 大型真空腔体设计、精密运动机构、真空互联系统 Design of large vacuum chambers, precision motion mechanisms, and vacuum interconnection systems | | 7 | 工具模具与涂层薄膜技术创新应用 Innovative Applications of Tools, Molds and Coating Thin Film Technologies | 切削刀具、模具的硬质涂层（TiN/TiAlN/DLC）及应用案例 Hard coatings (TiN/TiAlN/DLC) for cutting tools and molds and their application cases | | 8 | PVD、CVD与ALD：共性技术、装备及前沿探索 PVD, CVD and ALD: Generic Technologies, Equipment and Cutting-edge Explorations | 三大核心沉积技术的交叉融合、新型装备研发、原子级制造 Cross-integration of the three core deposition technologies, development of new equipment, and atomic-level manufacturing | | 9 | 塑料基材PVD镀膜适配性优化技术研究与实践 Research and Practice on Optimization Technology for Adaptability of PVD Coating on Plastic Substrates | 塑料表面活化、附着力提升、低温镀膜工艺及量产实践 Plastic Surface Activation, Adhesion Enhancement, Low-Temperature Coating Processes and Mass Production Practices |
【 同期活动（九大主题）| Concurrent Events (9 Themes) 】
为丰富参会体验、促进多维度交流合作，本届大会同期举办以下九大主题活动： 专题讲座：邀请国内外权威专家就真空技术前沿热点（如原子层沉积、等离子体诊断、超高真空技术等）开设深度讲座，理论与实践并重。 CEO会议：“2026第二届真空产业CEO交流会”，汇聚行业领军企业高管，围绕产业趋势、供应链安全、出海战略等闭门研讨。 项目路演：精选真空及相关领域的创新技术项目进行路演，对接投资机构与产业资本，助力成果转化。 产业招商：联合地方政府及产业园区举办招商推介会，发布优惠政策与配套支持，吸引优质真空项目落户。 供需对接：设立专场供需洽谈会，组织设备商、材料商、终端用户面对面交流，精准匹配采购需求与技术合作意向。 新品发布：为企业提供专属时段与展台，发布最新真空设备、核心部件、工艺解决方案，抢占市场先机。 墙报展示：面向高校及科研院所征集学术墙报，展示研究生及青年学者的创新成果，由专家委员会评选优秀墙报奖。 展览展示：设立超过3000平方米的专业展览区，预计吸引150余家领先企业参展，展示真空设备、材料、关键部件及全场景解决方案。 人才招聘：开设真空技术人才招聘专区，企业发布岗位需求，求职者现场投递简历，搭建行业人才供需桥梁。
此外，今年适逢深圳市真空技术行业协会（SAVTI）成立十周年，将隆重举行十周年庆典暨2026年会，诚邀新老朋友共襄盛举。
To enrich the conference experience and promote multi-dimensional exchanges and cooperation, the conference will concurrently host the following nine themed events: Special LecturesRenowned experts from home and abroad will be invited to deliver in-depth lectures on cutting-edge hot topics in vacuum technology (including atomic layer deposition, plasma diagnostics, ultra-high vacuum technology, etc.), with equal emphasis on theory and practice. CEO ForumThe "2nd 2026 Vacuum Industry CEO Exchange Conference" will bring together executives from leading enterprises in the industry for closed-door discussions on industrial trends, supply chain security, global expansion strategies, and other key topics. Project RoadshowSelected innovative technology projects in vacuum and related fields will be presented in roadshows, connecting investment institutions and industrial capital to facilitate the transformation of scientific and technological achievements. Industrial Investment PromotionIn cooperation with local governments and industrial parks, investment promotion conferences will be held to release preferential policies and supporting measures, attracting high-quality vacuum-related projects to settle in the region. Supply & Demand MatchingA dedicated supply and demand matchmaking session will be organized to facilitate face-to-face communications between equipment suppliers, material suppliers, and end-users, enabling precise matching of procurement needs and technical cooperation intentions. New Product LaunchEnterprises will be provided with exclusive time slots and booths to launch their latest vacuum equipment, core components, and process solutions, seizing market opportunities. Poster ExhibitionAcademic posters will be collected from universities and research institutes to showcase innovative achievements of graduate students and young scholars. Outstanding posters will be selected for awards by an expert committee. ExhibitionA professional exhibition area of over 3,000 square meters will be set up, attracting more than 150 leading enterprises to exhibit vacuum equipment, materials, key components, and full-scenario solutions. Talent RecruitmentA dedicated vacuum technology talent recruitment zone will be established, where enterprises will release job vacancies and job seekers can submit resumes on site, building a bridge for talent supply and demand in the industry.
In addition, this year marks the 10th Anniversary of the Shenzhen Association of Vacuum Technology Industry (SAVTI). A grand 10th Anniversary Celebration & 2026 Annual Meeting will be held, and we sincerely invite new and old friends to join this grand event.
【 参展与参会须知 | Exhibition & Conference Information 】 官方网站：www.ivtce.cn（注册、日程、展商信息） 报名截止：2026年10月14日前（早鸟优惠） 展位预订：优质展位“先到先得” 联系方式：黄新燕女士（会长助理），电话：+86-13670231076，邮箱：xhvacuum@163.com Official Website: www.ivtce.cn (registration, agenda, exhibitor information) Registration Deadline: Before October 14, 2026 (Early Bird Discount) Booth Reservation: Premium booths are available on a "first-come, first-served" basis Contact: Ms. Huang Xinyan (Assistant to the President)
Tel: +86-13670231076
Email: xhvacuum@163.com
本次会议是一年一届的国际性高水平技术交流盛宴，九大板块全面覆盖真空技术从基础研究到产业应用的全链条，九大同期活动为参会者提供学习、展示、对接、招聘的一站式平台。诚邀业界同仁、专家学者及合作伙伴金秋十月相聚深圳，共话“新技术、新应用、新融合、新机遇”！ As an annual international high-level technical event, this conference covers the entire industrial chain of vacuum technology from basic research to industrial applications through nine major sessions. The nine concurrent events provide participants with an all-in-one platform for learning, exhibition, matchmaking and recruitment. We sincerely invite industry colleagues, experts, scholars and partners to gather in Shenzhen this golden October to discuss "new technologies, new applications, new integration and new opportunities"
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